IEC 63041-3:2020 pdf download – Piezoelectric sensors – Part 3: Physical sensors.
3.1.1 piezoelectric acceleration sensor element piezoelectric sensor component whose resonance frequency or delay is used to measure the change in velocity of an object with time 3.1.2 piezoelectric humidity sensor element piezoelectric sensor component whose resonance frequency or delay is used for dew point and moisture detection 3.1.3 piezoelectric tilt angle sensor element piezoelectric sensor component whose resonance frequency or delay is used to measure tilt angles, elevation, or depression of an object with respect to gravity’s detection 3.1.4 piezoelectric vibration sensor element piezoelectric sensor component whose resonance frequency or delay is used for measurement of vibration 3.1.5 dual mode sensor piezoelectric sensor which is able to detect physical quantities from a change in resonance frequencies of two independent modes on a single piezoelectric plate Note 1 to entry: In order to achieve improved precision and/or to eliminate undesired influence factors, sensor solutions are employed that utilize two or more modes. By evaluation of combinations of these modes’ sensitivities to various ambient conditions, on the one hand, improved detection sensitivity can be achieved, while, on the other hand, undesirable sensitivities can be reduced or eliminated. 3.1.6 differential sensor piezoelectric sensor which is able to detect physical quantities from a change in resonance frequencies or delays of two independent and same micro-acoustic structures assembled on the same or different piezoelectric plates 3.1.7 multi-measurand sensor piezoelectric sensor which is able to detect two or more different physical quantities from an analysis of different sensor responses
4.2.3 Conceptual diagram for sensor elements of SAW delay-line type Figure 3 shows a transmission type (two-port) and Figure 4 shows a reflective type (one-port). Reflective delay lines use the SAW propagation path which is evaluated for delay and attenuation changes twice for incident and reflected wave, and therefore can be designed as smaller realizations. Reflective delay-line sensors can be designed to feature a unique sensor identification, in combination with their sensor capabilities, by using several SAW reflector structures resulting in a characteristic pattern of the reflected signal which can be distinguished from other sensors using the same frequency range.
4.3 Technical documents The physical reaction in sensor cell and detection methods are defined in Annex A. The following a) to f) shall clearly be defined in the specifications to be concluded between the manufacturer and customers: a) Avoidance of coupling of main and unwanted vibration modes; b) Detection direction of sensor element; c) Hysteresis of sensor elements; d) Linearity between sensor outputs and physical quantities to be detected; e) Overload characteristics by excessive physical quantities to be detected; f) Response time of sensor elements. 5 Delivery conditions See IEC 63041 -1 :201 7, Clause 7. 6 Quality and reliability See IEC 63041 -1 :201 7, Clause 8. 7 Test and measurement procedures See IEC 63041 -1 :201 7, Annexes A and B.
Generally, detection and measurement items are a) to d). a) Resonance frequency, delay, and electrical charged voltage covered herein are applied to the detection and measurement of force, pressure, torque, vibration, acceleration, etc. b) Resonance frequency, delay or insertion loss / gain covered herein are applied to the detection and measurement of viscosity. c) Resonance frequency or delay is applied to the detection and measurement of temperature. d) Resonance frequency is applied to the detection and measurement of film thickness. NOTE An electrical charged voltage is measured by non-acoustic type piezoelectric ceramic and quartz crystal sensors. For these specifications, the manufacturer and customer shall have detailed discussions, the discrepancies shall be eliminated, and the results shall clearly be described in the contract clause, the requirements specifications of the customer, the delivery specifications thereof or the like, and shall be settled as one of the contracts with the customer.